Journal article Open Access

Design, fabrication and characterization of piezoelectric cantilever MEMS for underwater application

B. Abdul; V.M. Mastronardi; A. Qualtieri; F. Guido; L. Algieri; F. Rizzi; M. De Vittorio

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@misc{b_abdul_2020_37736,
  author       = {B. Abdul and
                  V.M. Mastronardi and
                  A. Qualtieri and
                  F. Guido and
                  L. Algieri and
                  F. Rizzi and
                  M. De Vittorio},
  title        = {{Design, fabrication and characterization of 
                   piezoelectric cantilever MEMS for underwater
                   application}},
  month        = jun,
  year         = 2020,
  doi          = {10.1016/j.mne.2020.100050},
  url          = {https://doi.org/10.1016/j.mne.2020.100050}
}
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Publication date:
June 1, 2020
DOI:
10.1016/j.mne.2020.100050

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