Journal article Open Access

A Review on Active 3D Microstructures via Direct Laser Lithography

Irene Bernardeschi; Muhammad Ilyas; Lucia Beccai

DataCite XML Export

<?xml version='1.0' encoding='utf-8'?>
<resource xmlns:xsi="" xmlns="" xsi:schemaLocation="">
  <identifier identifierType="URL"></identifier>
      <creatorName>Irene Bernardeschi</creatorName>
      <creatorName>Muhammad Ilyas</creatorName>
      <creatorName>Lucia Beccai</creatorName>
    <title>A Review on Active 3D Microstructures via Direct Laser Lithography</title>
  <publisher>INFN Open Access Repository</publisher>
    <subject>General Earth and Planetary Sciences</subject>
    <subject>General Environmental Science</subject>
    <date dateType="Issued">2021-09-01</date>
  <resourceType resourceTypeGeneral="Text">Journal article</resourceType>
    <alternateIdentifier alternateIdentifierType="url"></alternateIdentifier>
    <relatedIdentifier relatedIdentifierType="DOI" relationType="IsIdenticalTo">10.1002/aisy.202100051</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf"></relatedIdentifier>
    <rights rightsURI="">Creative Commons Attribution 4.0</rights>
    <rights rightsURI="info:eu-repo/semantics/openAccess">Open Access</rights>
    <description descriptionType="Abstract">Direct laser lithography (DLL) is a key enabling technology for 3D constructs at the microscale and its potential is rapidly growing toward the development of active microstructures. The rationale of this work is based on the different involved methodology, which is referred as indirect, when passive microstructures become active through postprocessing steps, and direct, when active structures are directly obtained by fabricating microstructures with active materials or by introducing heterogeneous mechanical properties and specific design. An in‐depth analysis of both indirect and direct methods is provided. In particular, the wide range of materials and strategies involved in each method is reported, including advantages and disadvantages, as well as examples of fabricated structures and their applications. Finally, the different techniques are briefly summarized, and critically discussed by highlighting how the new synergies between DLL and active materials are opening completely new scenarios, in particular for sensing (e.g., mechanical) and actuation at the microscale.</description>
Views 0
Downloads 0
Data volume 0 Bytes
Unique views 0
Unique downloads 0


Cite as