Journal article Open Access

Soft Nanolithography by Polymer Fibers

Andrea Camposeo; Dario Pisignano; Roberto Cingolani; Elisa Mele; Deyu Tu; Giovanni Potente; Stefano Pagliara


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  <identifier identifierType="URL">https://www.openaccessrepository.it/record/74524</identifier>
  <creators>
    <creator>
      <creatorName>Andrea Camposeo</creatorName>
    </creator>
    <creator>
      <creatorName>Dario Pisignano</creatorName>
    </creator>
    <creator>
      <creatorName>Roberto Cingolani</creatorName>
    </creator>
    <creator>
      <creatorName>Elisa Mele</creatorName>
    </creator>
    <creator>
      <creatorName>Deyu Tu</creatorName>
    </creator>
    <creator>
      <creatorName>Giovanni Potente</creatorName>
    </creator>
    <creator>
      <creatorName>Stefano Pagliara</creatorName>
    </creator>
  </creators>
  <titles>
    <title>Soft Nanolithography by Polymer Fibers</title>
  </titles>
  <publisher>INFN Open Access Repository</publisher>
  <publicationYear>2011</publicationYear>
  <subjects>
    <subject>Electrochemistry</subject>
    <subject>Condensed Matter Physics</subject>
    <subject>Biomaterials</subject>
    <subject>Electronic, Optical and Magnetic Materials</subject>
  </subjects>
  <dates>
    <date dateType="Issued">2011-03-01</date>
  </dates>
  <language>en</language>
  <resourceType resourceTypeGeneral="Text">Journal article</resourceType>
  <alternateIdentifiers>
    <alternateIdentifier alternateIdentifierType="url">https://www.openaccessrepository.it/record/74524</alternateIdentifier>
  </alternateIdentifiers>
  <relatedIdentifiers>
    <relatedIdentifier relatedIdentifierType="DOI" relationType="IsIdenticalTo">10.1002/adfm.201001901</relatedIdentifier>
  </relatedIdentifiers>
  <rightsList>
    <rights rightsURI="info:eu-repo/semantics/openAccess">Open Access</rights>
  </rightsList>
  <descriptions>
    <description descriptionType="Abstract">We report on the use of polymer fibers for large-area soft nanolithography on organic and inorganic surfaces with 50 nm resolution. The morphology of fibers and of the corresponding patterned gap is investigated, demonstrating a lateral dimension downscaling of up to nine times, which greatly increases the achieved resolution during pattern transfer. In this way, we realize poly­mer field effect transistors with channel length and width as low as 250 nm that are expected to show transistor transition frequency up to a few MHz, and are thus exploitable as low-cost radio-frequency identification devices.</description>
  </descriptions>
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