Journal article Open Access

Soft Nanolithography by Polymer Fibers

Andrea Camposeo; Dario Pisignano; Roberto Cingolani; Elisa Mele; Deyu Tu; Giovanni Potente; Stefano Pagliara


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<oai_dc:dc xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd">
  <dc:creator>Andrea Camposeo</dc:creator>
  <dc:creator>Dario Pisignano</dc:creator>
  <dc:creator>Roberto Cingolani</dc:creator>
  <dc:creator>Elisa Mele</dc:creator>
  <dc:creator>Deyu Tu</dc:creator>
  <dc:creator>Giovanni Potente</dc:creator>
  <dc:creator>Stefano Pagliara</dc:creator>
  <dc:date>2011-03-01</dc:date>
  <dc:description>We report on the use of polymer fibers for large-area soft nanolithography on organic and inorganic surfaces with 50 nm resolution. The morphology of fibers and of the corresponding patterned gap is investigated, demonstrating a lateral dimension downscaling of up to nine times, which greatly increases the achieved resolution during pattern transfer. In this way, we realize poly­mer field effect transistors with channel length and width as low as 250 nm that are expected to show transistor transition frequency up to a few MHz, and are thus exploitable as low-cost radio-frequency identification devices.</dc:description>
  <dc:identifier>https://www.openaccessrepository.it/record/74524</dc:identifier>
  <dc:identifier>10.1002/adfm.201001901</dc:identifier>
  <dc:language>eng</dc:language>
  <dc:rights>info:eu-repo/semantics/openAccess</dc:rights>
  <dc:subject>Electrochemistry</dc:subject>
  <dc:subject>Condensed Matter Physics</dc:subject>
  <dc:subject>Biomaterials</dc:subject>
  <dc:subject>Electronic, Optical and Magnetic Materials</dc:subject>
  <dc:title>Soft Nanolithography by Polymer Fibers</dc:title>
  <dc:type>info:eu-repo/semantics/article</dc:type>
  <dc:type>publication-article</dc:type>
</oai_dc:dc>
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